Micropower thermoelectric generator from thin Si membranes
نویسندگان
چکیده
منابع مشابه
Micropower thermoelectric generator from thin Si membranes
We report the development of a Si-based micro thermogenerator build from silicon-oninsulator by using standard CMOS processing. Ultrathin layers of Si, 100 nm in thickness, with embedded n and p-type doped regions electrically connected in series and thermally in parallel, are the active elements of the thermoelectric device that generate the thermopower under various thermal gradients. This pr...
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ژورنال
عنوان ژورنال: Nano Energy
سال: 2014
ISSN: 2211-2855
DOI: 10.1016/j.nanoen.2013.12.007